Semiconductor: PECVD Graphite Carriers
NKCG is involved in the application of PECVD SiN deposition for anti-reflective coating of carriers since 1990.
- On request NKCG offers consultancy on process topics related to machines and boats (30 years process knowledge)
- New design of boats adapted to material, process and equipment conditions
- Implementation of the production-process together with customer
- Improvement of the boat’s lifetime and performance by special treatments
- Consultancy for cost reduction