Semiconductor: PECVD Graphite Carriers

NKCG is involved in the application of PECVD SiN deposition for anti-reflective coating of carriers since 1990.

Additional services:

  • On request NKCG offers consultancy on process topics related to machines and boats (30 years process knowledge)
  • New design of boats adapted to material, process and equipment conditions
  • Implementation of the production-process together with customer
  • Improvement of the boat’s lifetime and performance by special treatments
  • Consultancy for cost reduction
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